Two closed-form formulae for the frequency-dependent resistance of rectangular cross-sectional interconnects are presented.The frequency-dependent resistance R(f) of a rectangular interconnect line or a interconnect line with a ground plane structure is first obtained by a numerical method.Based on the strict numerical results, a novel closed-form formula R(f) for a rectangular interconnect alone is fitted out using the Levenberg-Marquardt method.This R(f) can be widely used for analyzing on-chip power grid IR-drop when the frequency is changing. Compared to the previously published R(f) formula for an interconnect,the formula provided here is more accurate during the frequency transition range.Also for a bigger width to thickness ratio,this formula shows greater accuracy and robustness.In addition,this paper fits out the closed-form R(f) formula for a micro-strip-like interconnect (an interconnect with a ground plane),which is a typical structure in the on-chip or package power delivery system.
制作了空调散热器用铝箔气味检测系统。该系统由PC机、调理控制电路、电源和装有传感器阵列的测试腔构成。数据处理方法采用了sum of deltV和神经网络相结合的方法,在Matlab环境中训练、仿真后,移植到LabVIEW平台上实现。实测表明在相对稳定的环境下该系统具备可重复性;系统的最终判定结果与气味工程师的判定结果一致。
An on-chip microelectromechanical system was fabricated in a 0.5 μm standard CMOS process for gas pressure detection.The sensor was based on a micro-hotplate(MHP) and had been integrated with a rail to rail operational amplifier and an 8-bit successive approximation register(SAR) A/D converter.A tungsten resistor was manufactured on the MHP as the sensing element,and the sacrificial layer of the sensor was made from polysilicon and etched by surface-micromachining technology.The operational amplifier was configured to make the sensor operate in constant current mode.A digital bit stream was provided as the system output.The measurement results demonstrate that the gas pressure sensitive range of the vacuum sensor extends from 1 to 105 Pa.In the gas pressure range from 1 to 100 Pa,the sensitivity of the sensor is 0.23 mV/ Pa,the linearity is 4.95%,and the hysteresis is 8.69%.The operational amplifier can drive 200 Ω resistors distortionlessly,and the SAR A/D converter achieves a resolution of 7.4 bit with 100 kHz sample rate.The performance of the operational amplifier and the SAR A/D converter meets the requirements of the sensor system.
