This paper reports that the film composed of flower-like ZnO micro-spheres, which consists of nano-sheets, is fab- ricated by chemical bath deposition. By adding hydrogen fluoride （HF） into the reaction solution, which contains zinc nitrate hexahydrate and hexamethylenetetramine, the ZnO crystal growth process is changed and the film composed by ZnO micro-spheres is obtained after keeping the reaction solution at 95 ℃ for 2 h. The morphology, crystal phase and wettahility of the sample axe characterized by scanning electron microscope, x-ray diffraction and contact angle meter, respectively. The results show that the filrrl has the micro-nano compound structure. After modification with heptadecafluorodecyltrimethoxy-silane, the wettability of the film changed from superhydrophilicity to superhydropho-bicity, on which water contact angle and the sliding angle are 154° and less than 5° for 8-μL water droplet, respectively. Additionally, the formation mechanism of the ZnO micro-sphere is also discussed.
