Nano machining based on SPM is a novel, nontraditional advanced manufacturing technique. There are three main machining methods based on SPM, i.e.single atom manipulation, surface modification using physical or chemical actions and mechanical scratching. The current development of this technique is summarized. Based on the analysis of mechanical scratching mechanism, a 5 μm micro inflation hole is fabricated on the surface of inertial confinement fusion (ICF) target. The processing technique is optimized. The machining properties of brittle material, single crystal Ge, are investigated. A micro machining system combining SPM and a high accuracy stage is developed. Some 2D and 3D microstructures are fabricated using the system. This method has broad applications in the field of nano machining.
DONG Shen YAN Yongda SUN Tao LIANG Yingchun CHENG Kai
