The laser bending of single-crystal silicon sheet （0.2 mm in thickness） was investigated with JK701 Nd：YAG laser. The models were developed to describe the beam characteristics of pulsed laser. In order to simulate the process of laser bending, the FEM software ANSYS was used to predict the heat temperature and stress-strain fields. The periodic transformation of temperature field and stress-strain distribution was analyzed during pulsed laser scanning silicon sheet. The results indicate that the mechanism of pulsed laser bending silicon is a hybrid mechanism in silicon bending, rather than a simple mechanism of TGM or BM. This work also gets silicon sheet bent after scanning 6 times with pulsed laser, and its bending angle is up to 6.5°. The simulation and prediction results reach well agreement with the verifying experiments.
WANG Xu-yue XU Wei-xing XU Wen-ji HU Ya-feng LIANG Yan-de WANG Lian-ji
Flexible forming of laminated-composite metal sheets (LCMS) using plasma arc is a latest technique, which produces LCMS components by thermal stress without mould and external force. Considering that the controllable temperature field is the key during the forming process, a three-layer FEM model, based on the characteristics along LCMS thickness direction, was developed to study the variation rules of temperature field, which was verified robustness by experimental validation. Besides, the influences of process parameters such as plasma arc power, scanning speed and plasma arc diameter on LCMS temperature field were performed. The comparisons of LCMS with single layer metal sheet (SLMS) show the temperature difference of LCMS along thickness direction is smaller than that of SLMS, but the heat-affected zone of LCMS along X axis is wider than that of SLMS under the same process parameters.
