Ga doped ZnO(GZO)/Cu grid double layer structures were prepared at room temperature(RT).We have studied the electrical and optical characteristics of the GZO/Cu grid double layer as a function of the Cu grid spacing distance.The optical transmittance and sheet resistance of the GZO/Cu grid double layer are higher than that of the GZO/Cu film double layer regardless of the Cu grid spacing distance and increase as the Cu grid spacing distance increases.The calculated values for the transmittance and sheet resistance of the GZO/Cu grid double layer well follow the trend of the experimentally observed transmittance and sheet resistance ones.For the GZO/Cu grid double layer with a Cu grid spacing distance of 1 mm,the highest figure of merit(φ_(TC)=6.19×10^(-3)Ω^(-1))was obtained.In this case,the transmittance,resistivity and filling factor(FF) of the GZO/Cu grid double layer are83.74%,1.10×10^(-4)Ω·cm and 0.173,respectively.