CO2 and O2 were employed as reactive gases to fabricate carbon-doped titanium oxide films using DC reactive magnetron sputtering. Microstructure, composition and optical band gap of the films were investigated by X-ray diffraction, X-ray photoelectron spectroscopy, and UV-visible spectrophotometer, respectively. The results showed that carbon-doped titanium monoxide films （C-TiO） with a carbon concentration of 5.8 at.% were obtained in an AffCO2 mixed atmosphere. However, carbon-doped futile and anatase （C-TiO2） with a carbon concentration of about 1.4 at.% were obtained in an Ar/CO2/O2 mixed atmosphere. The optical band gaps of C-TiO and C-TiO2 were about 2.6 and 2.9 eV, respectively. Both of them were narrower than that of pure TiO2 films. Films with narrowed optical band gap energy are promising in promoting their photo-catalytic activity.
Dong XieFeng WenWenmao YangXueyuan LiYongxiang LengGuojiang WanHong SunNan Huang
