A radio-frequency （rf） plasma sheath model in an oblique magnetic field is established and the energy distribution of ions （IED） incident on the rf sheath biased electrodes is numerically investigated. The simulation results reveal that the external magnetic field can have a decisive impact on the ion flux and energy distribution of the sheath. The ion energy can be transferred between the perpendicular and parallel components under the action of a magnetic field.
Dynamics of dust in a plasma sheath with a magnetic field was investigated using a single particle model. The result shows that the radius, initial position, initial velocity of the dust particles and the magnetic field do effect their movement and equilibrium position in the plasma sheath. Generally, the dust particles with the same size, whatever original velocity and position they have, will locate at the same position in the end under the net actions of electrostatic, gravitational, neutral collisional, and Lorentz forces. But the dust particles will not locate in the plasma sheath if their radius is beyond a certain value.
Bohm criterion in a magnetized plasma sheath is investigated with a fluid model. The upper and lower limits for the sheath criterion in different states of applied magnetic field are studied. The results from numerical simulation reveal that the magnetic field affects significantly the ion Mach number. The variation of the ion Mach number with the incident angle of the ions is also presented.
In this paper, an electronegative magnetized plasma sheath model with non-extensive electron distribution is established, and the Bohm criterion affected by the non-extensive parameter q is theoretically derived. The ion Mach number varies with q. The numerical simulation results show that compared with electronegative magnetized plasma sheath with Maxwell distribution(q=1), the sheath structures with super-extensive distribution(q<1) and sub-extensive distribution(q>1) are different. The physical quantities including the sheath potential distribution, ion density distribution, the electron density distribution, negative ion density distribution and the net space charge density distribution are discussed. It is shown that the non-extensive parameter q has a significant influence on the structure of the electronegative magnetized plasma sheath. Due to the Lorentz force, both the magnitude and the angle of the magnetic field affect the structure of the sheath, whether the electrons are Maxwell distributed or non-extensively distributed.
