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国家自然科学基金(61201078)

作品数:3 被引量:11H指数:2
发文基金:国家自然科学基金国家高技术研究发展计划更多>>
相关领域:自动化与计算机技术理学更多>>

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HIGH PERFORMANCE ELECTRIC FIELD MICRO SENSOR WITH COMBINED DIFFERENTIAL STRUCTURE被引量:7
2014年
This paper presents a high performance electric field micro sensor with combined differential structure.The sensor consists of two backward laid micro-machined chips,each packaged by polymer and metal.The novel combined differential structure effectively reduces various environmental affections,such as thermal drift,humidity drift and electrostatic charge accumulation.The sensor is tested in near-ground place as well as balloon-borne sounding.In different weather conditions,the measurement results showed good agreement with those of the commercial electric field mill.
Wen XiaolongPeng ChunrongFang DongmingYang PengfeiChen BoZheng FengjieXia Shanhong
A new fabrication process for the SOI-based miniature electric field sensor
2013年
This paper presents a new fabrication process for the SOI-based novel miniature electric field sensor. This new process uses polyimide film to release the SiO_2 layer.Compared with the CO_2 critical point release method,it significantly improves the device surface cleanliness and shortens the process flow.The impurity on the base layer is analyzed.The problem of peak and butterfly-type contamination occurring on the base layer of the SOI wafer during the DRIE process is discussed and solved by thickening the photoresist layer and coating with polyimide film twice.This new process could fabricate MEMS sensors and actuators such as SOI-based electric field sensors,gyroscopes,and micro mirrors and can be an alternative fabrication process compared to commercial SOIMUMPS fabrication processes.
刘伟杨鹏飞彭春荣方东明夏善红
High-stability electrostatic field micro sensor for sounding thunderstorm applications被引量:4
2014年
In this paper,the design and experimental results for a novel high-stability sounding electrostatic field micro sensor are presented.By means of hermetic chip sealing,digital weak signal demodulation unit,and probe sensor structure design,harsh environmental adaptation problems such as low temperature,high humidity,low air pressure,waterfall are solved.The sensor has a high resolution of 14 V/m,a wide measurement range of±100 kV/m,and is proved to have superior stability and performance in sounding electric field experiments than traditional sensors under different kinds of weather.
WEN XiaolongPENG ChunrongFANG DongmingYANG PengfeiREN TianlingXIA Shanhong
关键词:MEMSSOUNDING
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