A modified surface layer was formed on Ti-6Al-4V alloy by wet peening treatment. The variations of the residual stress,nano-hardness and microstructure of the modified layer with depth from surface were studied using X-ray diffraction analysis,nano-indentation analysis, scanning electron microscopy and transmission electron microscopy observations. The results show thatboth the compressive residual stress and hardness decrease with increasing depth, and the termination depths are 160 and 80 μm,respectively. The microstructure observation indicates that within 80 μm, the compressive residual stress and the hardness areenhanced by the co-action of the grain refinement strengthening and dislocation strengthening. Within 80–160 μm, the compressiveresidual stress mainly derives from the dislocation strengthening. The strengthened layer in Ti-6Al-4V alloy after wet peeningtreatment was quantitatively analyzed by a revised equation with respect to a relation between hardness and yield strength.
